Granted Patent
Utility
US 4,566,940 · App. 06/661,700
Manufacturing process for semiconductor integrated circuits
Inventors:
Manabu Itsumi, Kohei Ehara, Susumu Muramoto, Seitaro Matsuo
Patented Case
View Patent ↗
Granted: Jan 28, 1986
Filed: Oct 17, 1984
Inventors
Manabu Itsumi
Kohei Ehara
Susumu Muramoto
Seitaro Matsuo
Assignee (at issue)
Nippon Telegraph and Telephone Public Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.