Granted Patent
Utility
US 4,567,938 · App. 06/743,196
Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system
Inventor:
Norman L. Turner
Patented Case
View Patent ↗
Granted: Feb 4, 1986
Filed: Jun 10, 1985
Inventor
Norman L. Turner
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.