Granted Patent
Utility
US 4,568,835 · App. 06/438,468
Apparatus for detecting foreign matters on a planar substrate
Inventors:
Kazunori Imamura, Akikazu Tanimoto, Nobutoshi Abe
Patented Case
View Patent ↗
Granted: Feb 4, 1986
Filed: Nov 2, 1982
Inventors
Kazunori Imamura
Akikazu Tanimoto
Nobutoshi Abe
Assignee (at issue)
Nippon Kogaku K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.