IP Library Granted Patent US 4,569,124
Granted Patent Utility
US 4,569,124 · App. 06/613,114

Method for forming thin conducting lines by ion implantation and preferential etching

Inventors: David B. Rensch, John Chen
Patented Case View Patent ↗
Granted: Feb 11, 1986 Filed: May 22, 1984
Inventors
David B. Rensch
John Chen
Assignee (at issue)
Hughes Aircraft Company

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Quick Facts
Patent No.
US 4,569,124
App. No.
06/613,114
Filed
1984-05-22
Granted
1986-02-11
Kind
A