IP Library Granted Patent US 4,569,738
Granted Patent Utility
US 4,569,738 · App. 06/606,920

Method of producing amorphous carbon coatings on substrates by plasma deposition

Inventors: Jorg Kieser, Michael Neusch
Patented Case View Patent ↗
Granted: Feb 11, 1986 Filed: May 4, 1984
Inventors
Jorg Kieser
Michael Neusch
Assignee (at issue)
Leybold-Heraeus GmbH

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Quick Facts
Patent No.
US 4,569,738
App. No.
06/606,920
Filed
1984-05-04
Granted
1986-02-11
Kind
A