Granted Patent
Utility
US 4,571,685 · App. 06/506,677
Production system for manufacturing semiconductor devices
Inventor:
Mototaka Kamoshida
Patented Case
View Patent ↗
Granted: Feb 18, 1986
Filed: Jun 22, 1983
Inventor
Mototaka Kamoshida
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.