Granted Patent
Utility
US 4,571,850 · App. 06/611,522
Centrifugal wafer processor
Inventors:
James R. Hunt, Russell P. Balent
Patented Case
View Patent ↗
Granted: Feb 25, 1986
Filed: May 17, 1984
Inventors
James R. Hunt
Russell P. Balent
Assignee (at issue)
Fluorocarbon Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.