Granted Patent
Utility
US 4,575,636 · App. 06/605,244
Deep ultraviolet (DUV) flood exposure system
Inventor:
Fausto Caprari
Patented Case
View Patent ↗
Granted: Mar 11, 1986
Filed: Apr 30, 1984
Inventor
Fausto Caprari
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.