Granted Patent
Utility
US 4,576,829 · App. 06/687,366
Low temperature growth of silicon dioxide on silicon
Inventors:
Grzegorz Kaganowicz, John W. Robinson, John Thomas
Patented Case
View Patent ↗
Granted: Mar 18, 1986
Filed: Dec 28, 1984
Inventors
Grzegorz Kaganowicz
John W. Robinson
John Thomas
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.