IP Library Granted Patent US 4,577,141
Granted Patent Utility
US 4,577,141 · App. 06/675,323

System for driving a movable stage

Inventors: Kazuaki Saiki, Aiichi Ishikawa, Noriyoshi Hashimoto, Koichi Kudo, Kuniyuki Yoshikawa
Patented Case View Patent ↗
Granted: Mar 18, 1986 Filed: Nov 27, 1984
Inventors
Kazuaki Saiki
Aiichi Ishikawa
Noriyoshi Hashimoto
Koichi Kudo
Kuniyuki Yoshikawa
Assignee (at issue)
Nippon Kogaku K.K.

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Quick Facts
Patent No.
US 4,577,141
App. No.
06/675,323
Filed
1984-11-27
Granted
1986-03-18
Kind
A