Granted Patent
Utility
US 4,579,618 · App. 06/665,098
Plasma reactor apparatus
Inventors:
Salvatore A. Celestino, Georges J. Gorin, Stephen E. Hilliker, Gary Powell
Patented Case
View Patent ↗
Granted: Apr 1, 1986
Filed: Oct 29, 1984
Inventors
Salvatore A. Celestino
Georges J. Gorin
Stephen E. Hilliker
Gary Powell
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.