Granted Patent
Utility
US 4,581,101 · App. 06/657,524
Dry-etching process
Inventors:
Makoto Senoue, Kunihiko Terase, Shinya Iida, Hideo Komatsu
Patented Case
View Patent ↗
Granted: Apr 8, 1986
Filed: Oct 4, 1984
Inventors
Makoto Senoue
Kunihiko Terase
Shinya Iida
Hideo Komatsu
Assignees (at issue)
ASAHI GLASS CO., LTD.
KOKUSAI ELECTRIC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.