Granted Patent
Utility
US 4,582,020 · App. 06/607,065
Chemical vapor deposition wafer boat
Inventors:
Arthur J. Learn, Dale R. DuBois
Patented Case
View Patent ↗
Granted: Apr 15, 1986
Filed: May 4, 1984
Inventors
Arthur J. Learn
Dale R. DuBois
Assignee (at issue)
Anicon, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.