Granted Patent
Utility
US 4,584,026 · App. 06/634,397
Ion-implantation of phosphorus, arsenic or boron by pre-amorphizing with fluorine ions
Inventors:
Chung P. Wu, George L. Schnable
Patented Case
View Patent ↗
Granted: Apr 22, 1986
Filed: Jul 25, 1984
Inventors
Chung P. Wu
George L. Schnable
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.