Granted Patent
Utility
US 4,584,045 · App. 06/581,856
Apparatus for conveying a semiconductor wafer
Inventor:
Edmond A. Richards
Patented Case
View Patent ↗
Granted: Apr 22, 1986
Filed: Feb 21, 1984
Inventor
Edmond A. Richards
Assignee (at issue)
PLASMA-THERM LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.