Granted Patent
Utility
US 4,584,079 · App. 06/540,246
Step shape tailoring by phase angle variation RF bias sputtering
Inventors:
Eddie Lee, William H. Nunne
Patented Case
View Patent ↗
Granted: Apr 22, 1986
Filed: Oct 11, 1983
Inventors
Eddie Lee
William H. Nunne
Assignee (at issue)
Honeywell Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.