IP Library Granted Patent US 4,585,931
Granted Patent Utility
US 4,585,931 · App. 06/553,655

Method for automatically identifying semiconductor wafers

Inventors: Hibbert Alexander Duncan, Francis J. Ehret, Sherwin R. Kahn, Karen H. Kinney, Peter D. Parry
Patented Case View Patent ↗
Granted: Apr 29, 1986 Filed: Nov 21, 1983
Inventors
Hibbert Alexander Duncan
Francis J. Ehret
Sherwin R. Kahn
Karen H. Kinney
Peter D. Parry
Assignee (at issue)
AT&T Technologies Incorporated

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Quick Facts
Patent No.
US 4,585,931
App. No.
06/553,655
Filed
1983-11-21
Granted
1986-04-29
Kind
A