Granted Patent
Utility
US 4,590,042 · App. 06/685,650
Plasma reactor having slotted manifold
Inventor:
David J. Drage
Patented Case
View Patent ↗
Granted: May 20, 1986
Filed: Dec 24, 1984
Inventor
David J. Drage
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.