IP Library Granted Patent US 4,595,608
Granted Patent Utility
US 4,595,608 · App. 06/669,787

Method for selective deposition of tungsten on silicon

Inventors: Edward King, Kurt E. Gsteiger, Joseph S. Raby
Patented Case View Patent ↗
Granted: Jun 17, 1986 Filed: Nov 9, 1984
Inventors
Edward King
Kurt E. Gsteiger
Joseph S. Raby
Assignee (at issue)
HARRIS CORPORATION

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Quick Facts
Patent No.
US 4,595,608
App. No.
06/669,787
Filed
1984-11-09
Granted
1986-06-17
Kind
A