IP Library Granted Patent US 4,595,837
Granted Patent Utility
US 4,595,837 · App. 06/775,942

Method for preventing arcing in a device during ion-implantation

Inventors: Chung P. Wu, Frank Kolondra
Patented Case View Patent ↗
Granted: Jun 17, 1986 Filed: Sep 12, 1985
Inventors
Chung P. Wu
Frank Kolondra
Assignee (at issue)
RCA Corporation

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Quick Facts
Patent No.
US 4,595,837
App. No.
06/775,942
Filed
1985-09-12
Granted
1986-06-17
Kind
A