Granted Patent
Utility
US 4,596,763 · App. 06/655,824
Positive photoresist processing with mid U-V range exposure
Inventors:
John DiCarlo, Jonas O. St. Alban, Donald Mammato, Bruce M. Stevens
Patented Case
View Patent ↗
Granted: Jun 24, 1986
Filed: Oct 1, 1984
Inventors
John DiCarlo
Jonas O. St. Alban
Donald Mammato
Bruce M. Stevens
Assignee (at issue)
American Hoechst Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.