Granted Patent
Utility
US 4,597,989 · App. 06/635,833
Method of depositing silicon films with reduced structural defects
Inventors:
Casimir J. Wonsowicz, Glenn Canfield
Patented Case
View Patent ↗
Granted: Jul 1, 1986
Filed: Jul 30, 1984
Inventors
Casimir J. Wonsowicz
Glenn Canfield
Assignee (at issue)
Burroughs, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.