Granted Patent
Utility
US 4,602,713 · App. 06/534,949
Multiple wafer holder for a wafer transfer system
Inventors:
Richard J. Hertel, Leo V. Klos
Patented Case
View Patent ↗
Granted: Jul 29, 1986
Filed: Sep 22, 1983
Inventors
Richard J. Hertel
Leo V. Klos
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.