Granted Patent
Utility
US 4,606,806 · App. 06/811,306
Magnetron sputter device having planar and curved targets
Inventor:
John C. Helmer
Patented Case
View Patent ↗
Granted: Aug 19, 1986
Filed: Dec 16, 1985
Inventor
John C. Helmer
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.