Granted Patent
Utility
US 4,607,167 · App. 06/701,439
Charged particle beam lithography machine incorporating localized vacuum envelope
Inventor:
Paul F. Petric
Patented Case
View Patent ↗
Granted: Aug 19, 1986
Filed: Feb 12, 1985
Inventor
Paul F. Petric
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.