IP Library › Granted Patent US 4,609,568
Granted Patent Utility
US 4,609,568 · App. 06/634,936

Self-aligned metal silicide process for integrated circuits having self-aligned polycrystalline silicon electrodes

Inventors: Yun Bai Koh, Frank Chien, Madhu P. Vora
Patented Case View Patent ↗
Granted: Sep 2, 1986 Filed: Jul 27, 1984
Inventors
Yun Bai Koh
Frank Chien
Madhu P. Vora
Assignee (at issue)
Fairchild Camera & Instrument Corp.

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Quick Facts
Patent No.
US 4,609,568
App. No.
06/634,936
Filed
1984-07-27
Granted
1986-09-02
Kind
A