IP Library › Granted Patent US 4,610,748
Granted Patent Utility
US 4,610,748 · App. 06/679,898

Apparatus for processing semiconductor wafers or the like

Inventors: George Engle, Richard S. Rosler
Patented Case View Patent ↗
Granted: Sep 9, 1986 Filed: Dec 10, 1984
Inventors
George Engle
Richard S. Rosler
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.

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Quick Facts
Patent No.
US 4,610,748
App. No.
06/679,898
Filed
1984-12-10
Granted
1986-09-09
Kind
A