Granted Patent
Utility
US 4,611,919 · App. 06/588,028
Process monitor and method thereof
Inventors:
Edward A. Brooks, Jr., Roger M. Bithell
Patented Case
View Patent ↗
Granted: Sep 16, 1986
Filed: Mar 9, 1984
Inventors
Edward A. Brooks, Jr.
Roger M. Bithell
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.