Granted Patent
Utility
US 4,612,274 · App. 06/799,366
Electron beam/optical hybrid lithographic resist process in acoustic wave devices
Inventors:
Frederick Y. Cho, John R. Joseph, Philip Armin Seese
Patented Case
View Patent ↗
Granted: Sep 16, 1986
Filed: Nov 18, 1985
Inventors
Frederick Y. Cho
John R. Joseph
Philip Armin Seese
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.