Granted Patent
Utility
US 4,614,093 · App. 06/788,769
Method of starting and/or regenerating a cryopump and a cryopump therefor
Inventors:
Werner Bachler, Hans-Joachim Forth, Hans-Hermann Klein
Patented Case
View Patent ↗
Granted: Sep 30, 1986
Filed: Oct 18, 1985
Inventors
Werner Bachler
Hans-Joachim Forth
Hans-Hermann Klein
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.