Granted Patent
Utility
US 4,614,639 · App. 06/727,937
Compound flow plasma reactor
Inventor:
Andreas Hegedus
Patented Case
View Patent ↗
Granted: Sep 30, 1986
Filed: Apr 26, 1985
Inventor
Andreas Hegedus
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.