IP Library Granted Patent US 4,615,905
Granted Patent Utility
US 4,615,905 · App. 06/725,616

Method of depositing semiconductor films by free radical generation

Inventors: Stanford R. Ovshinsky, David D. Allred, Lee Walter, Stephen J. Hudgens
Patented Case View Patent ↗
Granted: Oct 7, 1986 Filed: Apr 22, 1985
Inventors
Stanford R. Ovshinsky
David D. Allred
Lee Walter
Stephen J. Hudgens
Assignee (at issue)
Sovonics Solar Systems

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Quick Facts
Patent No.
US 4,615,905
App. No.
06/725,616
Filed
1985-04-22
Granted
1986-10-07
Kind
A