IP Library Granted Patent US 4,616,908
Granted Patent Utility
US 4,616,908 · App. 06/632,449

Microlithographic system

Inventor: Michael King
Patented Case View Patent ↗
Granted: Oct 14, 1986 Filed: Jul 19, 1984
Inventor
Michael King
Assignee (at issue)
GCA Corporation

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Quick Facts
Patent No.
US 4,616,908
App. No.
06/632,449
Filed
1984-07-19
Granted
1986-10-14
Kind
A