IP Library Granted Patent US 4,618,565
Granted Patent Utility
US 4,618,565 · App. 06/741,358

Absorptive layer for optical lithography

Inventors: Lawrence K. White, Nancy A. Miszkowski, Aaron William Levine
Patented Case View Patent ↗
Granted: Oct 21, 1986 Filed: Jun 5, 1985
Inventors
Lawrence K. White
Nancy A. Miszkowski
Aaron William Levine
Assignee (at issue)
RCA Corporation

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Quick Facts
Patent No.
US 4,618,565
App. No.
06/741,358
Filed
1985-06-05
Granted
1986-10-21
Kind
A