Granted Patent
Utility
US 4,619,573 · App. 06/588,030
Article transport apparatus
Inventors:
Thomas M. Rathmann, Herbert G. Drake, Jr., Ninko T. Mirkovich, Roger B. Lachenbruch
Patented Case
View Patent ↗
Granted: Oct 28, 1986
Filed: Mar 9, 1984
Inventors
Thomas M. Rathmann
Herbert G. Drake, Jr.
Ninko T. Mirkovich
Roger B. Lachenbruch
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.