IP Library › Granted Patent US 4,619,844
Granted Patent Utility
US 4,619,844 · App. 06/693,401

Method and apparatus for low pressure chemical vapor deposition

Inventors: John M. Pierce, William I. Lehrer
Patented Case View Patent ↗
Granted: Oct 28, 1986 Filed: Jan 22, 1985
Inventors
John M. Pierce
William I. Lehrer
Assignee (at issue)
Fairchild Camera & Instrument Corp.

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Quick Facts
Patent No.
US 4,619,844
App. No.
06/693,401
Filed
1985-01-22
Granted
1986-10-28
Kind
A