Granted Patent
Utility
US 4,620,738 · App. 06/766,458
Vacuum pick for semiconductor wafers
Inventors:
Vladimir Schwartz, Avrum Freytsis
Patented Case
View Patent ↗
Granted: Nov 4, 1986
Filed: Aug 19, 1985
Inventors
Vladimir Schwartz
Avrum Freytsis
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.