IP Library › Granted Patent US 4,621,042
Granted Patent Utility
US 4,621,042 · App. 06/766,285

Absorptive planarizing layer for optical lithography

Inventors: Thomas R. Pampalone, James J. Di Piazza
Patented Case View Patent ↗
Granted: Nov 4, 1986 Filed: Aug 16, 1985
Inventors
Thomas R. Pampalone
James J. Di Piazza
Assignee (at issue)
RCA Corporation

This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.

Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 4,621,042
App. No.
06/766,285
Filed
1985-08-16
Granted
1986-11-04
Kind
A