Granted Patent
Utility
US 4,624,728 · App. 06/743,341
Pin lift plasma processing
Inventors:
Roger M. Bithell, Harry Slomowitz
Patented Case
View Patent ↗
Granted: Nov 25, 1986
Filed: Jun 11, 1985
Inventors
Roger M. Bithell
Harry Slomowitz
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.