Granted Patent
Utility
US 4,629,313 · App. 06/800,094
Exposure apparatus
Inventor:
Akikazu Tanimoto
Patented Case
View Patent ↗
Granted: Dec 16, 1986
Filed: Nov 20, 1985
Inventor
Akikazu Tanimoto
Assignee (at issue)
Nippon Kogaku K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.