Granted Patent
Utility
US 4,629,635 · App. 06/590,117
Process for depositing a low resistivity tungsten silicon composite film on a substrate
Inventor:
Daniel L. Brors
Patented Case
View Patent ↗
Granted: Dec 16, 1986
Filed: Mar 16, 1984
Inventor
Daniel L. Brors
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.