IP Library › Granted Patent US 4,632,624
Granted Patent Utility
US 4,632,624 · App. 06/588,027

Vacuum load lock apparatus

Inventors: Ninko T. Mirkovich, John Zajac
Patented Case View Patent ↗
Granted: Dec 30, 1986 Filed: Mar 9, 1984
Inventors
Ninko T. Mirkovich
John Zajac
Assignee (at issue)
TEGAL CORPORATION

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Quick Facts
Patent No.
US 4,632,624
App. No.
06/588,027
Filed
1984-03-09
Granted
1986-12-30
Kind
A