Granted Patent
Utility
US 4,634,331 · App. 06/680,202
Wafer transfer system
Inventor:
Richard J. Hertel
Patented Case
View Patent ↗
Granted: Jan 6, 1987
Filed: Dec 10, 1984
Inventor
Richard J. Hertel
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.