Granted Patent
Utility
US 4,635,282 · App. 06/699,402
X-ray source and X-ray lithography method
Inventors:
Ikuo Okada, Yasunao Saitoh, Hideo Yoshihara, Satoshi Nakayama
Patented Case
View Patent ↗
Granted: Jan 6, 1987
Filed: Feb 7, 1985
Inventors
Ikuo Okada
Yasunao Saitoh
Hideo Yoshihara
Satoshi Nakayama
Assignee (at issue)
Nippon Telegraph and Telephone Public Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.