Granted Patent
Utility
US 4,636,626 · App. 06/570,189
Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication
Inventors:
Junji Hazama, Kinya Kato, Akikazu Tanimoto, Hisao Izawa
Patented Case
View Patent ↗
Granted: Jan 13, 1987
Filed: Jan 12, 1984
Inventors
Junji Hazama
Kinya Kato
Akikazu Tanimoto
Hisao Izawa
Assignee (at issue)
Nippon Kogaku K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.