IP Library › Granted Patent US 4,637,836
Granted Patent Utility
US 4,637,836 · App. 06/778,986

Profile control of boron implant

Inventors: Doris W. Flatley, Sheng Teng Hsu
Patented Case View Patent ↗
Granted: Jan 20, 1987 Filed: Sep 23, 1985
Inventors
Doris W. Flatley
Sheng Teng Hsu
Assignee (at issue)
RCA Corporation

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Quick Facts
Patent No.
US 4,637,836
App. No.
06/778,986
Filed
1985-09-23
Granted
1987-01-20
Kind
A