Granted Patent
Utility
US 4,637,895 · App. 06/718,661
Gas mixtures for the vapor deposition of semiconductor material
Inventors:
Stanford R. Ovshinsky, Subhendu Guha, Prem Nath, Chi C. Yang, Jeffrey P. Fournier, James Kulman
Patented Case
View Patent ↗
Granted: Jan 20, 1987
Filed: Apr 1, 1985
Inventors
Stanford R. Ovshinsky
Subhendu Guha
Prem Nath
Chi C. Yang
Jeffrey P. Fournier
James Kulman
Assignee (at issue)
Energy Conversion Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.