Granted Patent
Utility
US 4,639,142 · App. 06/484,666
Dimension monitoring technique for semiconductor fabrication
Inventors:
Pei-Ming Daniel Chow, Keh-Fei C. Chi
Patented Case
View Patent ↗
Granted: Jan 27, 1987
Filed: Apr 13, 1983
Inventors
Pei-Ming Daniel Chow
Keh-Fei C. Chi
Assignee (at issue)
Rockwell International Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.