IP Library Granted Patent US 4,639,604
Granted Patent Utility
US 4,639,604 · App. 06/851,293

Method and apparatus for detecting an edge position of a pattern and eliminating overlapping pattern signals

Inventors: Seiro Murakami, Muneki Hamajima
Patented Case View Patent ↗
Granted: Jan 27, 1987 Filed: Apr 4, 1986
Inventors
Seiro Murakami
Muneki Hamajima
Assignee (at issue)
Nippon Kagaku K. K.

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Quick Facts
Patent No.
US 4,639,604
App. No.
06/851,293
Filed
1986-04-04
Granted
1987-01-27
Kind
A