Granted Patent
Utility
US 4,640,619 · App. 06/711,587
Microlithographic calibration scheme
Inventor:
Karl W. Edmark, III
Patented Case
View Patent ↗
Granted: Feb 3, 1987
Filed: Mar 13, 1985
Inventor
Karl W. Edmark, III
Assignee (at issue)
GCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.